Caracterización del haz de electrones emitido por la pistola de electrones egg-3101c con energías entre los 100 ev y 10 kev.

Abstract

The characterization of a charged particle beam generator system is fundamental for its use since it indicates the conditions of the equipment and its behavior in any installation. During this process, the optimum working parameters of the device for establishing at the minimum, maximum and recommended operating conditions are established. At the same time, the properties of the beam were analyzed in terms of the emitted current, beam profile, focus, deflection, grid, and the energy profile used. This study was carried out with different devices, such as a Faraday cup, phosphorescent screens, supports and feedthroughs. The most important results obtained include the spatial and energetic characterization of the beam. The spatial distribution of the beam follows a Gaussian function with an unfocused and focused standard deviation of 2.22 [mm] and 0.45 [mm] respectively. On another hand, the energy profile, in a range from 100 eV to 1 keV, follows a Gaussian distribution and by means of its FHWM it was possible to conclude that the energy dispersion is ~0.9%. Finally, it was detected that the impact location of the beam on the phosphor screen changes as a function of the accelerating voltage. All this information was compiled and written up in an equipment user manual as a basis for the operation of the EGG-3101C gun.